6 the zn3n2 is prepared on focus glass substrate at low temperature . and for the first time , a p - zno with a carrier density of 1017 ? cm - 3 is obtained by thermal zn3n2 in an oxygen ambient 5 、用等离子体增强的化学汽相沉积的方法制备了zn3n2薄膜，首次通过热氧化zn3n2的方法，制备出了受主型载流子浓度为1017cm - 3的p - zno薄膜。
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